Director of Research (if dissertation) or Advisor (if thesis)
Goddard, Lynford
Braun, Paul
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
Photonics
Thermo-optics
Scribe
Language
eng
Abstract
Photonic integrated circuits (PICs) are critical to modern data communications. However, many technologies used to fabricate PICs are planar, not allowing for arbitrary 3D structures. The Subsurface Controllable Refractive Index via Beam Exposure (SCRIBE) fabrication method offers 3D control of refractive index inside of porous silicon and silica films through two-photon polymerization of polymer within the films without additional mechanical supports. Many passive optical components have been demonstrated with the SCRIBE method. This work expands on the SCRIBE process by examining methods to integrate metal films to use as resistive heaters for thermal tuning of waveguide refractive index. First, it presents analytical models and simulations to design and predict the behavior of thermally tuned volumetric PICs, including expected power consumption and shifts in spectral features. Next, it outlines strategies to fabricate resistive heaters with SCRIBE-written devices, with discussions to guide future integration efforts of SCRIBE with top-surface fabrication methods. Afterwards, it presents discussion of experimental results, including blueshifted transmission spectra of a heated microring resonator and a Mach-Zehnder interferometer. It concludes with research paths towards higher efficiency devices and more capable optical characterization setups.
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