University of Illinois Urbana-Champaign

Enhancing cleanroom operations: From preventive equipment maintenance to lethal chemical asset tracking

Wang, Yaohui (Cody)

Permalink

https://hdl.handle.net/2142/125628

Description

Title
Enhancing cleanroom operations: From preventive equipment maintenance to lethal chemical asset tracking
Author(s)
Wang, Yaohui (Cody)
Issue Date
2024-07-17
Director of Research (if dissertation) or Advisor (if thesis)
Nahrstedt, Klara
Department of Study
Siebel Computing &DataScience
Discipline
Computer Science
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
  • Internet Of Things(iot)
  • Asset Tracking
  • Cyber Physical Systems
  • Embedded Systems
  • Cleanrooms
Language
eng
Abstract
This thesis introduces a comprehensive Internet of Things(IoT) monitoring framework tailored for academic cleanrooms, focusing on innovative solutions for preventive equipment maintenance and hazardous chemical tracking. The proposed framework is elucidated through two case studies: EcoMAT and MachineStethoscope. The first case study, EcoMAT, presents a novel asset tracking system employing permanent magnets to monitor hazardous chemicals. This magnet-based approach provides a cost-effective, highly accurate alternative to conventional Computer Vision(CV) and Radio Frequency(RF) systems. The system’s evaluation in cleanroom settings demonstrates its high localization precision, low latency, and minimal power consumption, highlighting its suitability for environments that demand stringent contamination control. The second case study, MachineStethoscope, details the development of a portable, edge- based Machine Health Monitoring System(MHMS). Leveraging IoT sensors and advanced data analytics, this system offers real-time, on-device anomaly detection. Field tests in academic laboratories affirm its effectiveness in detecting machine anomalies early, thereby reducing downtime and maintenance costs. Together, these case studies exemplify the application of the proposed IoT monitoring framework, providing scalable and practical solutions to enhance operational efficiency and safety in academic cleanrooms. This research significantly contributes to the optimization of maintenance practices and chemical tracking, ensuring the integrity and sustainability of scientific research environments.
Graduation Semester
2024-08
Type of Resource
Thesis
Handle URL
https://hdl.handle.net/2142/125628
Copyright and License Information
Copyright 2024 Yaohui (Cody) Wang

Owning Collections

Graduate Dissertations and Theses at Illinois PRIMARY
Graduate Theses and Dissertations at Illinois
Dissertations and Theses - Computer Science
Dissertations and Theses from the Siebel School of Computer Science