Enhancing cleanroom operations: From preventive equipment maintenance to lethal chemical asset tracking

Wang, Yaohui (Cody)

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https://hdl.handle.net/2142/125628 Copy

Description

Title

Enhancing cleanroom operations: From preventive equipment maintenance to lethal chemical asset tracking

Author(s)

Wang, Yaohui (Cody)

Issue Date

2024-07-17

Director of Research (if dissertation) or Advisor (if thesis)

Nahrstedt, Klara

Department of Study

Siebel Computing &DataScience

Discipline

Computer Science

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

M.S.

Degree Level

Thesis

Keyword(s)

• Internet of Things(IoT)
• Asset Tracking
• Cyber Physical Systems
• Embedded Systems
• Cleanrooms

Abstract

This thesis introduces a comprehensive Internet of Things(IoT) monitoring framework tailored for academic cleanrooms, focusing on innovative solutions for preventive equipment maintenance and hazardous chemical tracking. The proposed framework is elucidated through two case studies: EcoMAT and MachineStethoscope. The first case study, EcoMAT, presents a novel asset tracking system employing permanent magnets to monitor hazardous chemicals. This magnet-based approach provides a cost-effective, highly accurate alternative to conventional Computer Vision(CV) and Radio Frequency(RF) systems. The system’s evaluation in cleanroom settings demonstrates its high localization precision, low latency, and minimal power consumption, highlighting its suitability for environments that demand stringent contamination control. The second case study, MachineStethoscope, details the development of a portable, edge- based Machine Health Monitoring System(MHMS). Leveraging IoT sensors and advanced data analytics, this system offers real-time, on-device anomaly detection. Field tests in academic laboratories affirm its effectiveness in detecting machine anomalies early, thereby reducing downtime and maintenance costs. Together, these case studies exemplify the application of the proposed IoT monitoring framework, providing scalable and practical solutions to enhance operational efficiency and safety in academic cleanrooms. This research significantly contributes to the optimization of maintenance practices and chemical tracking, ensuring the integrity and sustainability of scientific research environments.

Graduation Semester

2024-08

Type of Resource

Thesis

Handle URL

https://hdl.handle.net/2142/125628

Copyright and License Information

Copyright 2024 Yaohui (Cody) Wang

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