Elastic scattering and transport of tin ions in hydrogen gas
Bartlett, Nathan
This item's files can only be accessed by the System Administrators group.
Permalink
https://hdl.handle.net/2142/125822
Description
Title
Elastic scattering and transport of tin ions in hydrogen gas
Author(s)
Bartlett, Nathan
Issue Date
2024-07-17
Director of Research (if dissertation) or Advisor (if thesis)
Ruzic, David N
Committee Member(s)
Andruczyk, Daniel
Department of Study
Nuclear, Plasma, & Rad Engr
Discipline
Nuclear, Plasma, Radiolgc Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
ions, EUV, scattering, cross section
Abstract
In order to continue increasing the power output of extreme ultraviolet lithography sources, the high energy tin ions, a byproduct of the source, must be mitigated. Otherwise, the ions will destroy critical components of the source rendering it useless. Therefore, understanding the basic physics governing their transport is needed to develop strategies for stopping the ions. This is the motivation for this thesis. This thesis reviews physics for understanding charged particle transport in relevant energy regimes for an EUV source. The interatomic potential between ! and molecular hydrogen is found using quantum chemistry software. This potential is used to calculate elastic and inelastic cross sections. Off the shelf and custom transport codes are used to calculate the stopping ability of hydrogen and predict its penetration distance into a hydrogen gas target. Energy loss due to collision induced dissociation was not a major sink of energy for the ions. Additionally, coulomb collisions with a background plasma are not a major energy loss mechanism.
Use this login method if you
don't
have an
@illinois.edu
email address.
(Oops, I do have one)
IDEALS migrated to a new platform on June 23, 2022. If you created
your account prior to this date, you will have to reset your password
using the forgot-password link below.
