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https://hdl.handle.net/2142/129639
Description
Title
Microplasma jet devices in quartz
Author(s)
Jamrozy, Michael Brandon
Issue Date
2025-05-09
Director of Research (if dissertation) or Advisor (if thesis)
Eden, J. Gary
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
microplasma
room-temperature plasma
plasma jet device
sterilization
Abstract
A microplasma jet device provides an efficient way of generating reactive species for the purpose of inactivating microbes. Such devices operate at room temperature and atmospheric pressure and may be used to sterilize medical equipment, treat infections, and disinfect the surface of food. This thesis discusses the fabrication of microplasma jet devices fabricated in fused silica. Previous research has demonstrated successful operation of the microplasma jet devices fabricated from polymers, including materials suitable for 3D printing or micro-molding. However, there are concerns about the long-term sustainability of microplasmas in these materials due to plasma-induced reactivity (such as sputtering) and thermal degradation. The chemical resistivity of fused silica makes it an ideal material to build a practical, long-lasting microplasma jet device.
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