University of Illinois Urbana-Champaign

Growth, physical properties, and nanostructuring of epitaxial metastable hafnium aluminum nitride

Howe, Brandon M.

Content Files
Howe_Brandon.pdf

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https://hdl.handle.net/2142/18339

Description

Title
Growth, physical properties, and nanostructuring of epitaxial metastable hafnium aluminum nitride
Author(s)
Howe, Brandon M.
Issue Date
2011-01-14T22:46:47Z
Director of Research (if dissertation) or Advisor (if thesis)
Petrov, Ivan G.
Doctoral Committee Chair(s)
Greene, Joseph E.
Committee Member(s)
  • Petrov, Ivan G.
  • Rockett, Angus A.
  • Zuo, Jian-Min
Department of Study
Materials Science & Engineerng
Discipline
Materials Science & Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Date of Ingest
2011-01-14T22:46:47Z
Keyword(s)
  • hafnium aluminum nitride (HfAlN)
  • hard coatings
  • thin films
  • sputtering
  • nanostructure
Graduation Semester
2010-12
Permalink
http://hdl.handle.net/2142/18339
Copyright and License Information
Copyright 2010 Brandon Marcus Howe

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