Growth, physical properties, and nanostructuring of epitaxial metastable hafnium aluminum nitride

Howe, Brandon M.

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https://hdl.handle.net/2142/18339 Copy

Description

Title

Growth, physical properties, and nanostructuring of epitaxial metastable hafnium aluminum nitride

Author(s)

Howe, Brandon M.

Issue Date

2011-01-14T22:46:47Z

Director of Research (if dissertation) or Advisor (if thesis)

Petrov, Ivan G.

Doctoral Committee Chair(s)

Greene, Joseph E.

Committee Member(s)

• Petrov, Ivan G.
• Rockett, Angus A.
• Zuo, Jian-Min

Department of Study

Materials Science & Engineerng

Discipline

Materials Science & Engr

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

Ph.D.

Degree Level

Dissertation

Keyword(s)

• hafnium aluminum nitride (HfAlN)
• hard coatings
• thin films
• sputtering
• nanostructure

Graduation Semester

2010-12

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http://hdl.handle.net/2142/18339

Copyright and License Information

Copyright 2010 Brandon Marcus Howe

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