Advanced control of MEMS probing devices

Zhang, Xuemeng

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https://hdl.handle.net/2142/26151 Copy

Description

Title

Advanced control of MEMS probing devices

Author(s)

Zhang, Xuemeng

Issue Date

2011-08-25T22:16:24Z

Director of Research (if dissertation) or Advisor (if thesis)

Salapaka, Srinivasa M.

Department of Study

Mechanical Sci & Engineering

Discipline

Mechanical Engineering

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

M.S.

Degree Level

Thesis

Keyword(s)

• micro-electro-mechanical systems (MEMS)
• electrostatic comb drive
• nanopositioning
• system identification
• H∞ control.

Abstract

This work is aimed at developing a control-system theoretic approach for addressing certain performance issues that arise in micro-electro-mechanical systems (MEMS). In particular, it focuses on applications such as nano-positioning, where control design becomes necessary to meet high resolution, bandwidth, and reliability (robustness) demands especially when there is significant model uncertainty and instrumentation noise. In this article, a systematic control design from robust control approach is demonstrated on a micro probing device with electrically separated sensing combs and driving combs. The system is identified through experimental input-output data and the hardware is setup in such a way that the resulting model is a linear time-invariant model with appropriate choice of variables even when the the underlying constitutive laws are nonlinear. Controllers are developed based on PID and H∞ control design methodologies. Control algorithms from PID control and robust control have been implemented on dSpace digital processing platform. The implemented control (H∞) design demonstrates a significant (≈ 400%) improvement in the bandwidth, where the bandwidths from the closed-loop sensitivity and complementary-sensitivity functions respectively are 68 Hz and 74 Hz. A significant improvement in reliability and repeatability (robustness to uncertainties) as well as noise attenuation is also demonstrated through this design.

Graduation Semester

2011-08

Permalink

http://hdl.handle.net/2142/26151

Copyright and License Information

Copyright 2011 by Xuemeng Zhang. All rights reserved.

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