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University of Illinois Urbana-Champaign

Modeling and measurements of an ionized physical vapor deposition device plasma

Juliano, Daniel Rene

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https://hdl.handle.net/2142/31254

Description

Title
Modeling and measurements of an ionized physical vapor deposition device plasma
Author(s)
Juliano, Daniel Rene
Director of Research (if dissertation) or Advisor (if thesis)
Ruzic, David N.
Doctoral Committee Chair(s)
Ruzic, David N.
Committee Member(s)
  • Sullivan, Jeremiah D.
  • Lamb, F.K.
  • Van Harlingen, Dale J.
Department of Study
Physics
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
PhD
Degree Level
Dissertation
Date of Ingest
2012-05-29T17:57:19Z
Type of Resource
text
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https://hdl.handle.net/2142/31254

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