University of Illinois Urbana-Champaign

Flexible/stretchable strain gauges based on single-crystalline silicon for biomedical applications

Ameen, Abid

Content Files
Abid_Ameen.pdf

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https://hdl.handle.net/2142/44793

Description

Title
Flexible/stretchable strain gauges based on single-crystalline silicon for biomedical applications
Author(s)
Ameen, Abid
Issue Date
2013-05-28T19:20:07Z
Director of Research (if dissertation) or Advisor (if thesis)
Rogers, John A.
Department of Study
Materials Science & Engineerng
Discipline
Materials Science & Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Date of Ingest
2013-05-28T19:20:07Z
Keyword(s)
  • flexible electronics
  • stretchable electronics
  • semiconductor nanomaterials
  • implanted biomedical devices
  • single-crystalline silicon sensor
  • strain gauge.
Abstract
Advancement in the semiconductor materials, mechanics and fabrication techniques enable the use of conventional wafer based electronics in unconventional ways via bio-integration. Tissue deformations as a vital sign are conventionally monitored through imaging technologies such as MRI. Strain gauges with equal or greater mechanical compliance are required to measure strains in soft substances, for instance, the human body. This thesis presents tissue-like soft strain gauges through successful integration of metal or silicon nanomembranes on thin flexible and stretchable substrates. Flexible metal strain gauge systems demonstrate high flexibility with low gauge factors, whereas flexible strain gauge systems based on semiconductor materials such as silicon exhibit high gauge factor attributing to their piezoresistive properties on both flexible and stretchable substrates. Innovative applications of high-performance flexible/stretchable strain gauges are demonstrated, including breath monitoring through chest motion detection, ischemia detection through heart motion monitoring, and so on. Tissue-like strain gauges have opened up a new chapter of low cost, high precision in vivo bio-strain quantification.
Graduation Semester
2013-05
Permalink
http://hdl.handle.net/2142/44793
Copyright and License Information
Copyright 2013 Abid Ameen

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