University of Illinois Urbana-Champaign

Inverse metal-assisted chemical etching of indium phosphide with sub-20 nm scalability

Kim, Seung Hyun

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Owning Collections

Graduate Dissertations and Theses at Illinois PRIMARY
Graduate Theses and Dissertations at Illinois
Dissertations and Theses - Electrical and Computer Engineering
Dissertations and Theses in Electrical and Computer Engineering