Microassembly via polymeric stamp-based transfer printing
Rhee, Sang Il
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https://hdl.handle.net/2142/73095
Description
Title
Microassembly via polymeric stamp-based transfer printing
Author(s)
Rhee, Sang Il
Issue Date
2015-01-21
Director of Research (if dissertation) or Advisor (if thesis)
Kim, Seok
Department of Study
Mechanical Sci & Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
transfer printing
microassembly
shape memory polymer
polydimethylsiloxane (PDMS) stamp
Abstract
This thesis aims to study microassembly of micro-scale objects involving transfer printing and its applications. Conventional top-down monolithic microfabrication schemes puts many limitations on fabricating structures with complex device architectures or packaging schemes. As such, engineering approaches enabling microassembly of multiple micro-machined components becomes highly desirable to complement conventional microfabrication. Polydimethylsiloxane (PDMS) or shape memory polymer (SMP) as “stamp material,” working in conjunction with 3-dimensional positioning stage, provides reliable and precise relocation method of a micro-scale object for device assembly. Theoretical approaches are studied and experimental assembly processes are performed. Micro-scale structures of various geometries have been assembled in a systematic manner for demonstration. In addition, nano-membrane resonant structure have been demonstrated for functioning device applications.
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