Growth of Single Crystal, Metastable Ge(1-X)sn(x) Alloys and Ge(1-X)sn(x)/ge Strained-Layer Superlattices on Ge(001)2 X 1 by Molecular Beam Epitaxy
Gurdal, Osman
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https://hdl.handle.net/2142/82886
Description
Title
Growth of Single Crystal, Metastable Ge(1-X)sn(x) Alloys and Ge(1-X)sn(x)/ge Strained-Layer Superlattices on Ge(001)2 X 1 by Molecular Beam Epitaxy
Author(s)
Gurdal, Osman
Issue Date
1997
Doctoral Committee Chair(s)
Joe Greene
Department of Study
Materials Science and Engineering
Discipline
Materials Science and Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Language
eng
Abstract
Single-crystal metastable diamond-structure $\rm Ge\sb{1-x}Sn\sb{x}$/Ge strained-layer superlattices (SLS) with x up to 0.24 (the equilibrium solid solubility of Sn in Ge is $<$0.01) were also grown on Ge(001)2x1 substrates using temperature-modulated molecular-beam epitaxy with maximum growth temperatures $\rm T\sb{s}\leq140\sp\circ$C. In-situ reflection high energy electron diffraction combined with post-deposition high-resolution x-ray diffraction (HR-XRD) and XTEM results showed that the $\rm Ge\sb{1-x}Sn\sb{x}(001)2x1$ alloy and Ge(001)2x1 spacer layers were commensurate. In fact, the alloy layers were essentially fully strained with an average in-plane lattice constant mismatch of $(1\pm2)\times10\sp{-5}$ and an average tetragonal strain in the growth direction of $(1.39\pm0.03)\times10\sp{-2}$ as determined from HR-XRD reciprocal-space lattice maps obtained using asymmetric (113) reflections. $\omega$ broadening of the zero-order SLS peak was only 30.1 arc-s full width at half maximum (FWHM), indicating that the degree of mosaicity in these structures was negligible. The intensities and positions of the satellite reflections and finite-thickness interference fringes in HR-XRD 004 rocking curve $\omega$-2$\theta$ scans were in good agreement with simulated curves obtained using a dynamical scattering model.
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