Iterative Learning Control for Precision Motion Control of Microscale and Nanoscale Tracking Systems
Bristow, Douglas Ashby
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https://hdl.handle.net/2142/83879
Description
Title
Iterative Learning Control for Precision Motion Control of Microscale and Nanoscale Tracking Systems
Author(s)
Bristow, Douglas Ashby
Issue Date
2007
Doctoral Committee Chair(s)
Andrew Alleyne
Department of Study
Mechanical Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Mechanical
Language
eng
Abstract
Second, we develop a set of time-frequency ILC design and analysis techniques. These techniques are used to custom-design the ILC for precision tracking of aggressive trajectories suitable for rapid microscale and nanoscale manufacturing, assembly, or scanning. They are also useful for applications where disturbance signals may change rapidly such as in micro- and nano-materials testing. The time-frequency ILC is applied to a 3-DOF piezo driven flexure stage yielding 4x higher bandwidth over the original feedback controller and achieving 1500 Hz tracking bandwidth during critical partitions of a given trajectory.
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