University of Illinois Urbana-Champaign

SUBMILLIMETER ABSORPTION SPECTROSCOPY IN SEMICONDUCTOR MANUFACTURING PLASMAS AND COMPARISON TO THEORETICAL MODELS

Helal, Yaser H.

Content Files
328465.pptx
895.pdf

Permalink

https://hdl.handle.net/2142/79462

Description

Title
SUBMILLIMETER ABSORPTION SPECTROSCOPY IN SEMICONDUCTOR MANUFACTURING PLASMAS AND COMPARISON TO THEORETICAL MODELS
Author(s)
Helal, Yaser H.
Contributor(s)
  • Armacost, Michael D.
  • Stout, Phillip J.
  • Craver, Barry
  • Agarwal, Ankur
  • Ewing, Paul R.
  • De Lucia, Frank C.
  • Neese, Christopher F.
Issue Date
23-Jun-15
Keyword(s)
Instrument/Technique Demonstration
Date of Ingest
2016-01-05T20:04:53Z
Abstract
Plasmas used in the semiconductor manufacturing industry are of a similar nature to the environments often created for submillimeter spectroscopic study of astrophysical species. At the low operating pressures of these plasmas, submillimeter absorption spectroscopy is a method capable of measuring the abundances and temperatures of molecules, radicals, and ions without disturbing any of the properties of the plasma. These measurements provide details and insight into the interactions and reactions occurring within the plasma and their implications for semiconductor manufacturing processes. A continuous wave, 500 to 750 GHz, absorption spectrometer was designed and used to make measurements of species in semiconductor processing plasmas. Comparisons with expectations from theoretical plasma models provide a basis for validating and improving these models, which is a complex and difficult science itself. Furthermore, these comparisons are an evaluation for the use of submillimeter spectroscopy as a diagnostic tool in manufacturing processes.
Publisher
International Symposium on Molecular Spectroscopy
Type of Resource
text
Genre of Resource
Conference Paper / Presentation
Language
English
Permalink
http://hdl.handle.net/2142/79462

Owning Collections

Abstracts & Presentations - 2015 International Symposium on Molecular Spectroscopy PRIMARY