Microassembly of a Silicon Micro-House

Kahn, Alex Nathan

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https://hdl.handle.net/2142/88862 Copy

Description

Title

Microassembly of a Silicon Micro-House

Author(s)

Kahn, Alex Nathan

Issue Date

2015-12-18

Director of Research (if dissertation) or Advisor (if thesis)

• Keum, Hohyun
• Kim, Seok

Department of Study

Mechanical Engineering

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

B.S. (bachelor's)

Degree Level

thesis

Keyword(s)

• Micro-masonry
• silicon
• transfer printing
• micro fabrication

Language

en

Abstract

This study provides details on the design, fabrication, and documentation of a silicon Micro-House made by micro-masonry. Micro-masonry is a microsystem construction method that incorporates the fabrication and assembly of silicon units, or inks. A model of a house was divided into 24 cross sections, and a corresponding optical mask allowed for the production of inks by conventional lithography processes. The inks were fabricated from two silicon on insulator wafers that had device layer thicknesses of 10 and 20 micron, so that different sections of the house could be made from different thickness inks. The inks were suspended on photoresist anchors, which facilitated pick-and-place assembly by transfer printing with elastomeric stamps. The structure was annealed after each layer was placed, to prevent delamination between subsequent layers. The final structure was documented with a scanning electron microscope, as a demonstrative piece to showcase the structural complexity capable through transfer printing.

Sponsor(s)/Grant Number(s)

ISUR

Type of Resource

text

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http://hdl.handle.net/2142/88862

Copyright and License Information

Copyright 2016 Alex Nathan Kahn

Owning Collections